Thin Film Coating & Microlithography

Thin Film Coating

Thin Film Coating of Metals and Dielectrics by :
- DC Magnetron Sputtering
- Electron Gun Beam Thermal Evaporation
- Resistive Thermal Evaporation
- Reactive Magnetron Sputtering
  · Conductive and Metal coating of :
   Ag, Au, Al, Cr, Cu, Fe, Ge, In, Ni, Pt ,Zn, ,Ti, ,AZO,ITO ,Co
 · Dielectric Thin Film coating of :
   Al2O3, Cr2O3, Fe2O3, MgF2,, ZnO WO3,TiO2, CuO , SiO2

  Applications:
 - Precision Mirror
 - Sensors
 - Anti-Reflection Layers
 - Optical Filters
 - Dielectric, Resistive and Conductive Thin Film Layers
 - Hard Coating Thin Film Layers
 - Protective Thin Films Layers
 Thickness: 5 Nanometer to 5 Microns
Tolerance: 10% to 20% 
 

Microlithography

Microlithography Services on Semiconductor Wafers, Metal Layers and Dielectric layers

Microlithography services on: 
 - Semiconductor surfaces such as on Silicon, Germanium and Indium antimonide 
 - Metal or Conductive Thin Film Layers such as Cr, Ni, Au, Cu, Ag, Al, ITO, FTO
 - Dielectric Thin Film Layers such as Cr2O3, SiO2 and glass

Chromium mask fabrication: Minimum line width 6 microns
Resolution: 1 Micron
 
Application:
 - Sensors
 - Schottky Diode 
 - Microwave Integrated Circuits
 - SAW Filter
 - Chip Resistors 
 - LCD