- High Vacuum Evaporation Systems (Model: ETS-160, EDS-160)
Specifications:
· Chamber: Stainless Steel
Volume: 110 Liters
2 View Ports, 17 Feedthrough Bores, 26 mm
· Final Pressure: 10-6 mbar
· Vacuum Pumps:
Mechanical Pump and Diffusion or Turbomolecular Pump
Main Menu
· Coating Vacuum Preparation Time: 40 minutes
· Operation:
Semiautomatic with Electrical Power
Water, Pressurized Air and Operator Malfunction Protection
· Chamber Lifting Mechanism: Pneumatic
Main Accessories:
· Electron Beam Evaporation Source, 3KW with 270o Beam Deflection Angle
· Power Supply 3KW,6KV for Electron Beam Source
· High Current Thermal Evaporation Source, 250 Amps, AC
· Nitrogen Cold Trap for Diffusion Pump
· Butterfly Valve for Diffusion Pump
· Computerized Thickness Monitoring System
· Rotational Sample Holder with Controller
· Sample Radiant Heater With PID Temperature Controller